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Ballscrew drive
Range ±50mm
Resolution 0.8 – 5μm
(depending on gearbox used)
Repeatability 1μm
Encoder resolution 1μm or 0.1μm

Nanomotor drive
Range ±50mm
Resolution 0.2μm
Repeatability 0.2μm
Encoder resolution 0.05μm

 

 

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Linear horizontal UHV translation stage, complete with motors, motor controller and cables ALU0100
Encoder for ballscrew stage with 1 micron resolution ALU0101
Encoder for ballscrew stage with 0.1 micron resolution ALU0102
Linear horizontal UHV translation stage, with single axis control unit and encoder ALU0200
Multi axis controller for piezo drives – please specifiy X axes up to 4

 

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